MFM-C300-Gas Mass Flow Meter

Features of Gas Mass Flow Meter：

  • ● Quick response
    ● High accuracy
    ● Supports adjustable measurement ranges.

MFM-C300-Gas Mass Flow Meter
  • Detail
  • Code of order
Item Model C300 - EtherCAT C300 - RS-485 C300 - Profibus DP
Measuring range   (Nitrogen test results) 10, 20, 50, 100, 200, 500 (sccm); 1, 2, 5, 10, 20,   50, 100, 200 (slm)
Air requirements Clean, dry gases
Measurable gases Air、N2、O2、CO2、He、H2、 CH4、Ar、SiH4、NH3、N2O、BCI3、CI2
Flow display Accuracy ±0.3% F.S. (≤30%F.S.   ); ±1.0% S.P. ( > 30%F.S. )
Repeatability (F.S.) ±0.2% F.S. or less
Resolution 0.01sccm ≤   100sccm；1sccm > 100sccm
Range ratio 50:1
Withstand pressure   (bar) 10 bar
Leakage rate Fluororubber sealing : 4×10-10 Pa    m3/s He or less; All-metal   sealing : 1×10-12 Pa m3/s He or less
Response time (s) Flow meter: 10ms or less; Controller: 1s or less
Startup time (s) 1s or less
Environment Operating temperature (℃) 0 ~ 50℃(No icing, no frosting)
Operating humidity (RH) 10% ~ 90%RH or less
Operating pressure Flow meter: 10bar; Controller: Maximum 6 bar   (customizable)
Storage temperature (℃) -20 ~ 85℃(No icing, no frosting)
Power Voltage DC 24 V (Via Side M8 connector) DC 24 V (Via Top DB9M connector) DC 24 V (Via Side M8 connector)
Power consumption (W) 2.7 or less
Electrical   parameters Top interface type RJ45 double-mesh(with indicator light) DB9M DB9F
Side interface type M8 aviation connector RJ45 double-mesh(without indicator light) M8 aviation connector
Communication method EtherCAT RS-485, 0 ~ 5 V, 4 ~ 20 mV Profibus DP
Communication output Profibus DP None None Communication via top DB9F interface; device address range: 1 (default)   to 255, adjustable via top dial; maximum 12M adaptive baud rate
EtherCAT Communication via top RJ45 interface; device address range: 1   (default) to 999, adjustable via upper-level software or command None None
RS-485 None Communication via top DB9M or side RJ45 interface; supports Modbus-RTU   and MKS protocols; device address range: 1 (default) to 99, supports baud   rates of 9600, 19200 (default), 38400, and others, adjustable via top dial Yes
Analog output 0 ~ 5 V None Communication via top DB9M interface (optional while ordering) None
4 ~ 20 mA None Communication via top DB9M interface (optional while ordering) None
Connector type No external connector (standard type) ; Compression   Fitting: 1/4", 1/2";    VCR1/4", VCR1/2"
Gas contact material Fluorosilicone rubber sealing: 316L stainless steel,   fluororubber, silicon nitride; all-metal sealing: 316L stainless steel
Body material Base：316L Stainless steel ; Outer shell: Aluminum   alloy
Sealing material FKM fluororubber or all-metal (316L stainless steel)
Weight (kg) Flow meter : 0.8; Controller: 0.85 ~ 2.8
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MFM-C300-Gas Mass Flow Meter
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