MFC-FC-Gas Mass Flow Meter/Controller

Features of Gas Mass Flow Meter/Controller：

  • ● High pressure resistance
    ● High accuracy, compact size
    ● High cost performance
    ● High repeatability

MFC-FC-Gas Mass Flow Meter/Controller
  • Detail
  • Code of order
Item Model MFC
Measuring range   (Nitrogen test results) 10, 20, 50, 100, 200, 500 (sccm); 1, 2, 5, 10, 20 ( slm )
Air requirements Clean, dry and non-corrosive gases
Measurable gases Air, N2, O2, CO2, He, H2, CH4, Ar…etc.
Flow display Accuracy 0.8% F.S. or 1.0% S.P., whichever is greater
Repeatability (F.S.) ±0.2%F.S. or less
Resolution 0.01 sccm ≤ 100 sccm, 0.1 sccm ≤ 1 slm and >100 sccm, 1   sccm ≤ 5 slm and >1 slm, 0.01 slm >5 slm
Range ratio 100:1
Withstand pressure   (bar) 9.8
Leakage rate 1×10-9 Pa m3/s He or   less
Response time (s) 1 or less
Startup time (s) 1 or less
Environment Operating temperature (℃) 0 ~ 50 (No icing, no   frosting)
Operating humidity (RH) 10% ~ 90% or less
Operating pressure 0.5 ~ 4 bar, > 2 slm; 0.5 ~ 6 bar, ≤2 slm(Specific range   details)
Storage temperature (℃) -20 ~ 85 (No icing, no   frosting)
Power Voltage DC 24V, ripple ≤ 50 mV
Power consumption (W) 2.7 or less
Communication   port Connector type D-SUB 9-pin
Analog control (mA) 0 ~ 5 V or 4 ~ 20 mA
Digital control RS-485 or RS-232
Communication output Connector type D-SUB 9-pin
Data transfer rate 9600 (Default setting), 14400, 19200, 38400, 56000, 57600,   115200 (Can be modified via commands or host computer)
Communication protocol Modbus-RTU
Device position 1 (Default setting) ~ 250 (Can be modified via commands or   host computer)
Connector type No external connector (standard type) ; Quick connector: Ø6,   Ø8mm; Compression Fitting: 6mm, 8mm, 1/8", 1/4"; VCR1/4"
Gas contact material 316L Stainless steel, FKM, Silicon dioxide
Body material Base：316L Stainless steel ; Outer shell: Aluminum alloy
Sealing material FKM
Weight (kg) 0.9
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MFC-FC-Gas Mass Flow Meter/Controller
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*Please select the required specifications in order, and the corresponding products will be generated below.

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● Note: For models without external connectors, a G1/4 female thread . Please refer to the dimension chart. Customization is not supported.

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● Supports both digital and analog output (avoid to output in the same time to prevent interference)

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● Supports both digital and analog output (avoid to output in the same time to prevent interference)

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L O A D I N G